FEI Titan³ 80-300
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Contact
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Dr. Martin Peterlechner (Director Transmission Electron Microscopy)
Tel.. 0721 608-43719 (martin peterlechner∂kit edu)
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Electron emitter
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Schottky FEG
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Energy
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80 kV, 300 kV
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Detectors
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STEM imaging: Fischione Model 3000 ADF detector, Gatan BF/DF detector
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EDXS: EDAX Si(Li) detector with Moxtek AP 3.3 window
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STEM Unit with bright-field, dark-field and high-angle annular dark-field (HAADF) detector (resolution down to 0.14 nm (at 300 kV))
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Corrector
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CEOS Cetcor image-side spherical aberration corrector)
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Wien type monochromator
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Camera
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TVIPS XF416(R) on-axis CMOS camera (4k x 4k)
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US1000 (2kx2k) at Gatan Tridiem GIF
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Lense and aperture
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Flexible condenser lens system (3 lenses) allows for tuneable convergence angle or Köhler illumination
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10 µm C2 aperture allowing a convergence angle down to ~0.12 mrad with a probe size of a few nm in µP STEM mode
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Resolution
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0,08 nm (TEM)
0,14 nm (STEM)
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Imaging /
Spectroscopic methods
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Energy-dispersive X-ray spectroscopy (EDXS)
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| Electron energy loss spectroscopy (EELS) with Gatan Imaging Filter (GIF) Tridiem 865 HR with Gatan Ultrascan1000 (2k x 2k), energy resolution 0,2 eV and energy filtered imaging (ESI) | |
| Möllenstedt biprism for off-axis electron holography |
