FEI Helios G4
| Contact |
Tel. 0721 608-48294 (erich mueller ∂does-not-exist.kit edu) |
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Source |
Schottky thermal field emission gun (SEM)
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Gallium liquid metal ion source (FIB) |
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Energy |
20 eV - 30 keV (Secondary and backscatter electrons) (SEM) |
| 500 eV - 30 keV (FIB) | |
| Beam current | 0,8 pA - 100 nA (SEM) |
| 0,1 pA - 65 nA (FIB) | |
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Detectors |
EDXS Detektor: Bruker XFlash 6|60 (60mm2 SDD, slew AP3.3. window) |
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Everhart-Thornley (ETD) detector (for SE and BSE) |
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In-chamber electron (ICE) detector |
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Through-lens detector (TLD), mirror detector, In-column detector (ICD) |
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STEM detector, (BF segment, ADF segments, HAADF segment) |
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Exchangeable EBSD (Electron Backscatter Diffraction) and TKD (Transmissions-Kikuchi-Beugungs-Analyse) detector |
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Resolution |
0,34 nm (BF-STEM) |
| 4 nm (FIB) | |
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Imaging / Spectroscopic methods
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Secondary and backscatter electron imaging |
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Energy dispersive X-ray spectroscopy (EDXS) |
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Crystal structure and orientation determination with EBSD (Electron Backscatter Diffraction) |
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Focused-ion-beam sectioning, 3-dimensional reconstruction of the sample volume |
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Low-energy STEM, BF-STEM |
