Contact

M. Sc. Jonas Kaltenbach

Tel. 0721 608-48682, -46507, -45264 (jonas kaltenbach ∂does-not-exist.kit edu)

Source

Schottky field emitter

Energy

Some 100 eV to 30 keV (secondary and backscattering electrons)

Detectors

EDXS detector

Everhart-Thornley-Detector (ETD)

Robinson's Backscattered electron (BSE) detector

In-lens detector

Resolution

1 nm at 20 keV, 3 nm at 1 keV (secondary electrons)

Imaging /

Spectroscopic methods

EDXS

Electron-beam-induced current (EBIC) system for ESEM mode (Contact: Aina Quintilla, CFN)