Zeiss Leo 1530 Gemini
|
Contact
|
Tel. 0721 608-48682, -46507, -45264 (volker zibat ∂does-not-exist.kit edu) |
|
Source |
Schottky field emitter |
|
Energy |
Some 100 eV to 30 keV (secondary and backscattering electrons) |
|
Detectors |
EDXS detector |
|
Everhart-Thornley-Detector (ETD) |
|
|
Robinson's Backscattered electron (BSE) detector |
|
|
In-lens detector |
|
|
Resolution |
1 nm at 20 keV, 3 nm at 1 keV (secondary electrons) |
|
Imaging / Spectroscopic methods |
EDXS |
|
Electron-beam-induced current (EBIC) system for ESEM mode (Contact: Aina Quintilla, CFN) |