Contact

Nadejda Firman

Tel. +49 721 608 - 4 7003 (nadejda firman ∂does-not-exist.kit edu)

Source

Dual Miniature Penning Ion Sources (PIGs)

Ions

Ar⁺

± 10 ° each

Vacuum

≥ 7 × 10^-6 mbar

Vacuum system

Two-stage diaphragm pump backing
an 80 L/s turbo drag pump (oil-free)

Ion beam energy

0,1 – 8,0 kV

Specimen stage

„Gatan Specimen Post“ for one-sided milling

„DuoPost“ for double-sided milling

Sample size

3 or 2,3 mm

Microscope

Optional optical stereo microscope

"Digital Zoom Microscope": In-situ observation by digital camera

Sample exchange time

< 30 s (Wisperlok™ Stage)

Temperature

Cooling with liquid nitrogen

Usage

Semiconductors

Metals (oxides, alloys)

Ceramics

Operation

Touchscreen

Automatic ending via light transmission