FEI DualBeam Strata 400S
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Contact |
Tel. 0721 608-48294 (erich mueller ∂does-not-exist.kit edu) |
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Source |
Schottky FEG
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| Ba-LMIS (FIB) | |
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Energy |
Some 100 eV to 30 keV |
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Detectors |
Everhart-Thornley-Detector (ETD) |
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Through-the-Lens-Detector (TLD) |
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STEM-III-Detector: bright-field (BF) a+b, dark-field (DF) a+b+c, high-angle annular dark-field (HAADF) in combination with a flip-stage |
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EDXS-Detector: Bruker XFlash 5010 SDD detector (< 123 eV FWHM Mn Kα-line, Moxtek AP 3.3 window, 10mm2 detector area) |
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Residual gas analyzer by Pfeiffer Vacuum |
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Camera |
2 light cameras |
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Sample holder |
Flip-stage holding 6 electron-transparent samples simultaneously |
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Resolution |
1 nm at 30 keV (STEM)
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7 nm (FIB) |
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Imaging / Spectroscopic methods |
Detected electrons: secondary (SE), back-scattered (BSE), transmitted (STEM) |
| Energy dispersive X-ray spectroscopy (EDX)
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Accessories |
Gas-injection-system (GIS) for Pt and W deposition |
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OmniProbe manipulator “AutoProbe” |
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Cold trap |
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In-situ plasma cleaner by Evactron |
